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Multiuser equipment approved in grant 2012/50259-8: e-beam evaporator

Grant number: 18/23379-9
Support type:Multi-user Equipment Program
Duration: December 01, 2018 - November 30, 2025
Field of knowledge:Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
Principal Investigator:Eunezio Antonio de Souza
Grantee:Eunezio Antonio de Souza
Home Institution: Centro de Pesquisas Avançadas em Grafeno, Nanomateriais e Nanotecnologia (MackGrafe). Universidade Presbiteriana Mackenzie (UPM). Instituto Presbiteriano Mackenzie. São Paulo , SP, Brazil
Associated research grant:12/50259-8 - Graphene: photonics and opto-electronics: UPM-NUS collaboration, AP.SPEC
As informações de acesso ao Equipamento Multiusuário são de responsabilidade do Pesquisador responsável
EMU web page:https://www.mackenzie.br/mackgraphe/pesquisa/equipamento-multiusuario/
Tipo de equipamento:Processos Físicos - Modificação superfícies – etching - Feixes iônicos
Processos Físicos - Litografia - Feixes de elétrons
Fabricante: Mbraun
Modelo: MB Provap Ebeam

Abstract

The e-beam type evaporator will enable the microfiber processes of the photonic devices integrated to the two-dimensional materials, such as graphene and dicalcogenetos of transition metals. In this way, the e-beam evaporator will allow the deposition of metallic contacts in electro-optic field-effect devices, these being one of the main applications sought in the Project SPEC- Photonic in graphene (AU)