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Atomistic simulation of MEMS microfabrication processes

Grant number: 09/06766-0
Support type:Scholarships in Brazil - Master
Effective date (Start): August 01, 2009
Effective date (End): January 31, 2011
Field of knowledge:Engineering - Electrical Engineering
Principal researcher:Marcelo Nelson Páez Carreño
Grantee:Fábio Belotti Colombo
Home Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
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Academic Publications
(References retrieved automatically from State of São Paulo Research Institutions)
COLOMBO, Fábio Belotti. Desenvolvimento de um software para simulação atomística de processos de microfabricação baseado em autômatos celulares.. 2011. Master's Dissertation - Universidade de São Paulo (USP). Escola Politécnica São Paulo.

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