High power impulse magnetron sputtering - HiPIMS for Ag-DLC film production

• Grant number: 10/10351-7
• Support Opportunities: Scholarships in Brazil - Doctorate
• Start date: November 01, 2010
• End date: August 31, 2013
• Field of knowledge: Engineering - Materials and Metallurgical Engineering - Nonmetallic Materials
• Principal Investigator: Lúcia Vieira
• Grantee: Sara Fernanda Fissmer
• Host Institution: Divisão de Ciências Fundamentais (IEF). Instituto Tecnológico de Aeronáutica (ITA)

Abstract

In this work is proposed the study of inserting silver particles in DLC films through plasma-assisted techniques with goal of studying DLC reduction rate in atomic oxygen and also compare the tribological properties, such as the friction coefficient and wear of DLC films with and without silver nanoparticles. Mechanical properties, such as adhesion, of DLC deposited on metallic substrates will be studied due to high internal and external stress. To improve the adhesion will be used Physical vapour deposition assisted by High Power Impulse Magnetron Sputtering - HiPIMS. This is a technique recently developed for deposition of thin films via magnetron sputtering uses highly ionized plasmas. This will be possible to establish unique conditions for the growth films with superior properties then conventional sputtering, so high compression level, defects free, high substrates adhesion among others. The silver nanoparticles distribution will be studied on the DLC in relation of nucleating, coalescence and grains shapes. (AU)