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Optimization of MnM substrate manufacturing processes used for millimeter-wave devices

Grant number: 16/03093-8
Support Opportunities:Scholarships in Brazil - Scientific Initiation
Effective date (Start): April 01, 2016
Effective date (End): November 30, 2016
Field of knowledge:Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Circuits
Principal Investigator:Ariana Maria da Conceicao Lacorte Caniato Serrano
Grantee:Rogério Clementino Araújo de Alvarenga
Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
Associated research grant:12/15159-2 - High performance and lowcost MnM devices for millimeter-wave applications from 30 to 110 GHz, AP.JP


The emerging telecommunications market in millimeter wave from 30 GHz to 300 GHz has incited a great worldwide interest for the development of high-performance and low cost transceivers to the consumer market. The first results of the JP project showed that the losses and the quality factor of manufactured transmission lines are comparable to state-of-the-art. However, despite relying on conventional and well developed microelectronics processes, fabricating these devices is delicate and little reproductive. This is due to the use of a substrate formed by the nanoporous membrane (MnM substrate) whose reduced thickness makes it flexible and susceptible to deformations and ruptures. Technological developments proposed in this IC will contribute not only to make this a more reliable and reproducible technology, but also allow the increase in the manufacturing of devices with better performance and more complex than the previous ones. For example, the planarization of the membrane, can further reduce the losses of the devices, and allows a more precise electromagnetic modeling. Since the selective growth of nanowires plays an important role in the fabrication of vias and of transmission lines with low and high impedance. Selective corrosion of the substrate will allow the implementation this technology to other devices not proposed in JP project, as phase shifters and MEMS switches. (AU)

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