AMORPHOUS HYDROGENATED CARBON FILM

Document type:	Patente
Inventor(s):	Luiz Gonçalves Neto; Ronaldo Domingues Mansano; Giuseppe Antonio Cirino; Luis da Silva Zambom

Applicant:	Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) ; Universidade de São Paulo (USP)
Deposit date:	May 2002, 08
INPI register:	PCT/BR2002/000067
IPC:	C23C 16/26

Abstract

(EN) The present invention concerns an improved process for the deposition of amorphous hydrogenated carbon film, more specifically an improved low temperature, low power and low vacuum cathodic sputtering process. The invention also concerns the film produced by said process and articles containing an amorphous hydrogenated carbon film coating.

Grantee:	Ronaldo Domingues Mansano
Principal Investigator:	Ronaldo Domingues Mansano
Institution:	Universidade de São Paulo (USP). Escola de Engenharia de São Carlos (EESC)
Support Opportunities:	Research Grants - Support for Intellectual Property Rights and Licensing (PAPI/Nuplitec)

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