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(Reference retrieved automatically from Web of Science through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

110-GHz Through-Substrate-Via Transition Based on Copper Nanowires in Alumina Membrane

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Author(s):
Pinheiro, Julio M. [1] ; Rehder, Gustavo P. [1] ; Gomes, Leonardo G. [1] ; Alvarenga, Rogerio C. A. [1] ; Pelegrini, Marcus V. [1] ; Podevin, Florence [2, 3] ; Ferrari, Philippe [2, 3] ; Serrano, Ariana L. C. [1]
Total Authors: 8
Affiliation:
[1] Univ Sao Paulo, Lab Microelect, BR-05508900 Sao Paulo - Brazil
[2] Univ Grenobles Alpes, IMEP LAHC, F-380010 Grenoble - France
[3] CNRS, IMEP LAHC, F-38000 Grenoble - France
Total Affiliations: 3
Document type: Journal article
Source: IEEE Transactions on Microwave Theory and Techniques; v. 66, n. 2, p. 784-790, FEB 2018.
Web of Science Citations: 2
Abstract

A new through-substrate via (TSV) for millimeter-wave frequencies is proposed. The via is formed by copper nanowires connecting the bottom and top surfaces of a porous alumina membrane. It is shown here that the nanowire via is simple to fabricate using a low-cost technology. The nanowire vias were tested as coplanar waveguide transitions and characterized up to 110 GHz. The results show insertion loss better than 0.37 dB and return loss better than 14 dB per transition at 110 GHz. An electrical model for the vias was derived to give a design tool for circuit designers. These TSVs, along with the high-performance transmission lines already developed on the porous alumina membranes, contribute to a powerful platform for the design of high-performance circuits on this innovative interposer. (AU)

FAPESP's process: 12/15159-2 - High performance and lowcost MnM devices for millimeter-wave applications from 30 to 110 GHz
Grantee:Ariana Maria da Conceicao Lacorte Caniato Serrano
Support type: Research Grants - Young Investigators Grants
FAPESP's process: 11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process
Grantee:Gustavo Pamplona Rehder
Support type: Research Grants - Young Investigators Grants