Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts

Author(s)

Amoresi, Rafael A. C. ^[1] ; Cichetto Jr, Leonelio ; Kundu, Swarup ^[1] ; Teodoro, Marcio D. ^[2] ; Marques, Gilmer E. ^[2] ; Longo, Elson ^[3] ; Andres, Juan ^[4] ; Chiquito, Adenilson J. ^[2] ; Zaghete, Maria A. ^[1]

Affiliation

^[1] Sao Paulo State Univ UNESP, Chem Inst, LIEC, BR-14800060 Araraquara, SP - Brazil

^[2] Univ Fed Sao Carlos UFScar, Dept Phys, BR-13565905 Sao Carlos, SP - Brazil

^[3] Cichetto Jr, Jr., Leonelio, Univ Fed Selo Carlos UFSCAR, Dept Chem, LIEC, BR-13565905 Sao Carlos, SP - Brazil

^[4] Cichetto Jr, Jr., Leonelio, Univ Jaume 1, Dept Analyt & Phys Chem, Castellon de La Plana 12071 - Spain

• Document type: Journal article
• Source: Applied Physics Letters; v. 113, n. 13 SEP 24 2018.
• Web of Science Citations: 0

Abstract

Two-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low dimensional gas at the interface. This work demonstrates a method to contact the 2DEG formed at the oxide interfaces connected by platinum electrodes which were made by the decomposition of organometallic gas using focused ion beams. On the surface, the electrodes were defined through photolithography, and at the interface, the electrodes were deposited through the focused ion beams and electrons, which were then evaluated. The quality of the interface electrodes was evaluated at two different partial oxygen pressures (pO(2)) used for the film deposition: low (10(-4) mbar) and high (10(-1) mbar). The electrode deposition conditions using electrons or ions have resulted in different rates of metal deposition and interaction with the interface leading to either metallic (2DEG) or insulating behavior. Published by AIP Publishing. (AU)

• FAPESP's process: 17/13024-6 - CDMF - Center for the Development of Functional Materials
• Grantee: Swarup Kundu
• Support Opportunities: Scholarships in Brazil - Post-Doctoral
• FAPESP's process: 14/01371-5 - Obtention of memories with LaNiO3 and LaNiO3/BaTiO3 using PLD
• Grantee: Leonélio Cichetto Junior
• Support Opportunities: Scholarships in Brazil - Post-Doctoral
• FAPESP's process: 17/23663-6 - Irradiation by femtosecond laser in thin films of LaNiO3 deposited by PLD for study of structural and physical properties for application in ferroelectric memories
• Grantee: Leonélio Cichetto Junior
• Support Opportunities: Scholarships abroad - Research Internship - Post-doctor