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Femtosecond laser-induced microstructuring and color centers in silicon carbide

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Author(s):
Cunha, Renan ; de Paula, Kelly Tasso ; Andrade, Marcelo B. ; Pimenta, Ana Clara S. ; Misoguti, Lino ; Mendonca, Cleber R.
Total Authors: 6
Document type: Journal article
Source: CERAMICS INTERNATIONAL; v. 51, n. 25, p. 8-pg., 2025-10-01.
Abstract

Femtosecond direct laser writing (fs-DLW) is a precise and adaptable micromachining technique widely used for surface modification and defect engineering. It enables deterministic structuring critical for next-generation technologies and facilitates the study of material properties that are otherwise challenging to determine. Here, we investigate the interplay between incubation effects and defect formation in 4H silicon carbide (4H-SiC) under sub-bandgap irradiation. We analyze surface and subsurface structural changes across three incubation regimes using atomic force microscopy, Raman and photoluminescence spectroscopy. Our results show a pulse number-dependent transition in material redistribution, crystalline phase transitions, and the formation of additional silicon phases. We also identify spectral signatures consistent with room-temperature fs-DLW-induced color centers associated with silicon vacancies currently studied as optically addressable solid-state qubits for scalable quantum photonics. We characterize three scenarios for color center generation and discuss the ionization mechanisms driving material modification. Our findings indicate that multiphoton absorption dominates the optical breakdown. Finally, we estimate the nonlinear absorption cross-section and determine the nonlinear refractive index via nonlinear ellipse rotation measurements. (AU)

FAPESP's process: 13/07276-1 - CEPOF - Optics and Photonic Research Center
Grantee:Vanderlei Salvador Bagnato
Support Opportunities: Research Grants - Research, Innovation and Dissemination Centers - RIDC
FAPESP's process: 24/12541-0 - Advanced biological labels based on triphenylamine derivatives: probes for ultrafast imaging
Grantee:Renan Souza Cunha
Support Opportunities: Scholarships in Brazil - Support Program for Fixating Young Doctors
FAPESP's process: 18/11283-7 - Nonlinear photonics: spectroscopy and advanced processing of materials
Grantee:Cleber Renato Mendonça
Support Opportunities: Research Projects - Thematic Grants
FAPESP's process: 23/11839-3 - Extreme behavior of light-matter interaction in plasmonic nanostructures coupled with 2D materials
Grantee:Ana Clara Sampaio Pimenta
Support Opportunities: Scholarships in Brazil - Post-Doctoral