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(Referência obtida automaticamente do Web of Science, por meio da informação sobre o financiamento pela FAPESP e o número do processo correspondente, incluída na publicação pelos autores.)

Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry

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Autor(es):
Benevides, Rodrigo ; Santos, Felipe G. S. ; Luiz, Gustavo O. ; Wiederhecker, Gustavo S. ; Mayer Alegre, Thiago P.
Número total de Autores: 5
Tipo de documento: Artigo Científico
Fonte: SCIENTIFIC REPORTS; v. 7, MAY 30 2017.
Citações Web of Science: 7
Resumo

Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves and to explore their interaction with light in the so-called optomechanical cavities. Because of their challenging design, these cavities are traditionally fabricated using dedicated high-resolution electron-beam lithography tools that are inherently slow, limiting this solution to small-scale or research applications. Here we show how to overcome this problem by using a deep-UV photolithography process to fabricate optomechanical crystals in a commercial CMOS foundry. We show that a careful design of the photonic crystals can withstand the limitations of the photolithography process, producing cavities with measured intrinsic optical quality factors as high as Q(i) = (1.21 +/- 0.02) x 10(6). Optomechanical crystals are also created using phononic crystals to tightly confine the GHz sound waves within the optical cavity, resulting in a measured vacuum optomechanical coupling rate of g(0) = 2 pi x (91 +/- 4) kHz. Efficient sideband cooling and amplification are also demonstrated since these cavities are in the resolved sideband regime. Further improvements in the design and fabrication process suggest that commercial foundry-based optomechanical cavities could be used for quantum ground-state cooling. (AU)

Processo FAPESP: 14/12875-4 - Cristais fotônicos e fonônicos
Beneficiário:Rodrigo da Silva Benevides
Linha de fomento: Bolsas no Brasil - Mestrado
Processo FAPESP: 13/06360-9 - Estudo de cavidades optomecânicas
Beneficiário:Felipe Gustavo da Silva Santos
Linha de fomento: Bolsas no Brasil - Doutorado
Processo FAPESP: 12/17610-3 - Optomecânica em cristais fotônicos e fonônicos
Beneficiário:Thiago Pedro Mayer Alegre
Linha de fomento: Auxílio à Pesquisa - Apoio a Jovens Pesquisadores
Processo FAPESP: 12/17765-7 - Nanofotônica em semicondutores do Grupo IV e III-V
Beneficiário:Gustavo Silva Wiederhecker
Linha de fomento: Auxílio à Pesquisa - Apoio a Jovens Pesquisadores
Processo FAPESP: 16/18308-0 - Optomecânica quântica em microcavidades
Beneficiário:Rodrigo da Silva Benevides
Linha de fomento: Bolsas no Brasil - Doutorado