Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry

Autor(es)

Raele, Marcus Paulo ^[1] ; De Pretto, Lucas Ramos ^[1] ; de Rossi, Wagner ^[1] ; Vieira, Jr., Nilson Dias ^[1] ; Samad, Ricardo Elgul ^[1]

Afiliação do(s) autor(es)

^[1] IPEN CNEN SP, Nucl & Energy Res Inst, Ave Prof Lineu Prestes, 2242, Cidade Univ, BR-05508000 Sao Paulo, SP - Brazil

• Tipo de documento: Artigo Científico
• Fonte: SCIENTIFIC REPORTS; v. 9, MAR 12 2019.
• Citações Web of Science: 0

Resumo

We designed a real time, single-laser focus tracking system using low coherence properties of the machining femtosecond laser itself in order to monitor and correct the sample position relative to the focal plane. Using a Michelson Interferometer, the system collects data arising from part of the beam backscattered at the ablation spot. The data is analyzed by a custom software for position correction (employing an XYZ automated translation stage). With the focus tracking enabled we were able to etch channels with a stable cross-section profile on a bovine tooth with relief amplitude tens of times greater than the Rayleigh length of the system, keeping the sample inside the confocal parameter during most of the processing time. Moreover, the system is also capable of monitoring crater depth evolution during the ablation process, allowing for material removal assessment. (AU)

• Processo FAPESP: 15/24878-0 - Desenvolvimento de sistema interferométrico para controle dinâmico de foco aplicado na usinagem por laser de femtosegundos
• Beneficiário: Marcus Paulo Raele
• Linha de fomento: Auxílio à Pesquisa - Regular
• Processo FAPESP: 15/15775-3 - Algoritmo para análise de autocorrelação de sinal de tomografia por coerência óptica para acompanhamento de fluxo sanguíneo em camundongos com síndrome metabólica
• Beneficiário: Lucas Ramos de Pretto
• Linha de fomento: Bolsas no Brasil - Doutorado