Evaluating residual stresses in compositionally graded TiN films via ab initio and Rietveld simulation

Autor(es)

Miscione, Juan Manuel Costa ; da Silva, Felipe Carneiro ; Marcondes, Michel Lacerda ; Petrilli, Helena Maria ; Schon, Claudio Geraldo

• Tipo de documento: Artigo Científico
• Fonte: MATERIALIA; v. 28, p. 17-pg., 2023-02-24.

Resumo

The grazing incidence X-ray diffraction (GIXRD) stress measurement method, based on the classic sin2 psi method, is a well-established procedure for the evaluation of compressive residual stresses (CRS) in thin deposited films. Problems arise when using this approach in single-phase compositionally graded films, since both mechanical and diffraction properties vary with film depth. A method of obtaining CRS gradient was developed which consists in simulating a stressed GIXRD pattern via Rietveld simulation and ab initio obtained X-ray elastic constants (XECs) in order to evaluate the stress profile across the film. This work successfully describes the CRS profile of compositionally graded TiN films obtained by Grid Assisted Magnetron Sputtering (GAMS), insofar as the biaxial stress assumptions are valid and within the limits imposed by the sin2 psi method. (AU)

• Processo FAPESP: 19/07661-9 - Instabilidades de rede funcionais em perovskitas naturalmente estruturadas
• Beneficiário: Michel Lacerda Marcondes dos Santos
• Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado
• Processo FAPESP: 18/07760-4 - Instabilidades de rede funcionais em perovskitas naturalmente estruturadas
• Beneficiário: Helena Maria Petrilli
• Modalidade de apoio: Auxílio à Pesquisa - Regular