Foundry Polymer-Based Inverted-Rib Waveguides

Autor(es)

Malheiros-Silveira, G. N. ; Finardi, C. A. ; Van Etten, E. A. M. A. ; Burger, T. S. ; da Silva, R. C. G. ; Daltrini, A. M. ; Panepucci, R. R. ; IEEE

• Tipo de documento: Artigo Científico
• Fonte: 2018 SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE (SBFOTON IOPC); v. N/A, p. 3-pg., 2018-01-01.

Resumo

Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented. (AU)

• Processo FAPESP: 13/07559-3 - Instituto Brasileiro de Neurociência e Neurotecnologia - BRAINN
• Beneficiário: Fernando Cendes
• Modalidade de apoio: Auxílio à Pesquisa - Centros de Pesquisa, Inovação e Difusão - CEPIDs