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(Referência obtida automaticamente do Web of Science, por meio da informação sobre o financiamento pela FAPESP e o número do processo correspondente, incluída na publicação pelos autores.)

High speed e-beam writing for large area photonic nanostructures - a choice of parameters

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Li, Kezheng ; Li, Juntao ; Reardon, Christopher ; Schuster, Christian S. ; Wang, Yue ; Triggs, Graham J. ; Damnik, Niklas ; Mueenchenberger, Jana ; Wang, Xuehua ; Martins, Emiliano R. ; Krauss, Thomas F.
Número total de Autores: 11
Tipo de documento: Artigo Científico
Fonte: SCIENTIFIC REPORTS; v. 6, SEP 16 2016.
Citações Web of Science: 6

Photonic nanostructures are used for many optical systems and applications. However, some high-end applications require the use of electron-beam lithography (EBL) to generate such nanostructures. An important technological bottleneck is the exposure time of the EBL systems, which can exceed 24 hours per 1 cm(2). Here, we have developed a method based on a target function to systematically increase the writing speed of EBL. As an example, we use as the target function the fidelity of the Fourier Transform spectra of nanostructures that are designed for thin film light trapping applications, and optimize the full parameter space of the lithography process. Finally, we are able to reduce the exposure time by a factor of 5.5 without loss of photonic performance. We show that the performances of the fastest written structures are identical to the original ones within experimental error. As the target function can be varied according to different purposes, the method is also applicable to guided mode resonant grating and many other areas. These findings contribute to the advancement of EBL and point towards making the technology more attractive for commercial applications. (AU)

Processo FAPESP: 16/05809-0 - Nano-fotônica para energias renováveis e direcionamento de luz
Beneficiário:Emiliano Rezende Martins
Linha de fomento: Auxílio à Pesquisa - Regular