Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering

Autor(es)

Brandt, Iuri S. ^{[1, 2]} ; Pla Cid, Cristiani C. ^[1] ; Azevedo, Carlos G. G. ^[3] ; Pereira, Andre L. J. ^[4] ; Benetti, Luana C. ^[1] ; Ferlauto, Andre S. ^[5] ; Dias da Silva, Jose H. ^[3] ; Pasa, Andre A. ^[1]

Afiliação do(s) autor(es)

^[1] Univ Fed Santa Catarina, Lab Filmes Finos & Superf, BR-88040900 Florianopolis, SC - Brazil

^[2] Univ Fed Santa Catarina, Programa Posgrad Ciencia & Engn Mat, BR-88040900 Florianopolis, SC - Brazil

^[3] Univ Estadual Paulista UNESP, Fac Ciencias, BR-17033360 Bauru, SP - Brazil

^[4] UFGD, BR-79804970 Dourados, MS - Brazil

^[5] Univ Fed Minas Gerais, Dept Fis, BR-31270901 Belo Horizonte, MG - Brazil

• Tipo de documento: Artigo Científico
• Fonte: RSC ADVANCES; v. 8, n. 13, p. 7062-7071, 2018.
• Citações Web of Science: 4

Resumo

TiO2 films are grown on LaAlO3 (001), Si (100) and SiO2 substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO2/LaAlO3 fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO2/LaAlO3 films. For the growth of TiO2 onto SiO2, rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase [112] twins in films grown on the different substrates, suggesting that the anatase [112] twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO2/LaAlO3 films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the {[}001] direction, whereas results for TiO2/SiO2 are compatible with lower crystalline ordering. (AU)

• Processo FAPESP: 17/18916-2 - Otimização do Crescimento de Filmes de Co3O4 para Aplicações Fotovoltaicas e Fotocatalíticas
• Beneficiário: Jose Humberto Dias da Silva
• Modalidade de apoio: Auxílio à Pesquisa - Regular