Determination of the polymeric thin film thickness by energy dispersive X-ray fluorescence and multivariate analysis

Autor(es)

de Almeida, Eduardo ^[1] ; Melquiades, Fabio L. ^[2] ; Marques, Joao P. R. ^[1] ; Margui, Eva ^[3] ; de Carvalho, Hudson W. P. ^[1]

Afiliação do(s) autor(es)

^[1] Univ Sao Paulo, Ctr Nucl Energy Agr, Av Centenario 303, BR-13416000 Piracicaba, SP - Brazil

^[2] Univ Estadual Londrina, Phys Dept, Rodovia Celso Garcia Cid, PR 445, Km 380, BR-86057970 Londrina, PR - Brazil

^[3] Univ Girona, Dept Chem, C Maria Aurelia Capmany 69, Girona 17003 - Spain

• Tipo de documento: Artigo Científico
• Fonte: SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY; v. 167, MAY 2020.
• Citações Web of Science: 0

Resumo

The objective of this work was to investigate the potential of energy dispersive X-ray fluorescence spectrometry for polymeric thin film thickness measurements using univariate and multivariate statistical tools. To this end, nine polymeric films 1.5 to 7.6 mu m thick with different composition were used for calibration and validation purposes. The univariate approach was not suitable as thickness measurement strategy, because the coefficient of determination (R-2) between the Rh-Ka Compton (18.54-19.83 keV) counting rate and the thin film thickness was estimated as 0.873 (n = 9). Even lower R-2 values were estimated for other X-ray spectral regions. On the other hand, the multivariate approach proved to be appropriated for the polymeric thin film thickness measurement, presenting satisfactory R-2 values (0.993-0.998; n = 8), precision (4%) and recovery (97%). The scanning electron microscopy was employed for validation of the proposed multivariate strategy. One can concluded that we show that the energy dispersive X-ray fluorescence using multivariate approach is a powerful non-destructive tool to measure the polymeric thin film thickness. (AU)

• Processo FAPESP: 15/05942-0 - Investigação do metabolismo de nanomateriais absorvidos por plantas empregando-se espectroscopias vibracional e de Raios X
• Beneficiário: Hudson Wallace Pereira de Carvalho
• Modalidade de apoio: Auxílio à Pesquisa - Jovens Pesquisadores