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Fabrication and Electrical Characterization of MOS Solar Cells for Energy Harvesting

Autor(es):
Watanabe, Marcos Norio ; Chiappim Junior, William ; Christiano, Veronica ; Izumi, Fabio ; dos Santos Filho, Sebastiao Gomes ; IEEE
Número total de Autores: 6
Tipo de documento: Artigo Científico
Fonte: 2018 33RD SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO); v. N/A, p. 4-pg., 2018-01-01.
Resumo

This paper discusses the metal-oxidesemiconductor (MOS) solar cells for energy harvesting applications using Al(200nm)/SiO2(1.73nm)/Si-p and Al(200nm)/Mg(30nm)/SiO2(1.73nm)/Si-p structures. P-type (100) silicon wafers with resistivity of 10 Omega.cm were used. The gate oxide was obtained by rapid thermal processing (RTP) and the main parameters studied were extracted by means of electric characterization through IxV curves of the MOS solar cells with areas of 3.24 cm(2). A different behavior compared to the cells in literature was observed with lower fill factor (similar to 30% against similar to 85%) attributed to the MOS solar cells under the effect of series resistance (similar to 12 Omega) and low dark current density (similar to 0.1 mu A/cm(2)), which determined reproducible electrical characteristics for energy harvesting in indoor environments with conversion efficiencies up to 12.8% and generated power up to 1mW/cm(2). (AU)

Processo FAPESP: 16/17826-7 - Fabricação de células solares MOS utilizando estruturas Al/TiO2/SiO2/Si
Beneficiário:William Chiappim Junior
Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado