DLC deposition inside of a long tube by using the pulsed-DC PECVD process

Autor(es)

Pillaca, E. J. D. M. ^[1] ; Ramirez, M. A. ^{[1, 2]} ; Gutierrez Bernal, J. M. ^[3] ; Lugo, D. C. ^[1] ; Trava-Airoldi, V. J. ^[1]

Afiliação do(s) autor(es)

^[1] Natl Inst Space Res, Sensors & Mat Associated Lab, Sao Jose Dos Campos, SP - Brazil

^[2] Univ Paraibas Valley, UNIVAP, Sao Jose Dos Campos, SP - Brazil

^[3] Univ Nacl Colombia, Fac Ingn, Bogota - Colombia

• Tipo de documento: Artigo Científico
• Fonte: SURFACE & COATINGS TECHNOLOGY; v. 359, p. 55-61, FEB 15 2019.
• Citações Web of Science: 3

Resumo

In this study, the pulsed-DC PECVD deposition system was used to produce Diamond-like carbon (DLC) film on the internal surface of a long metal tube (200 cm in length and 10 cm in diameter) employed as the deposition chamber itself. Firstly, the features of plasma discharges and the temperature distribution along the tube external surface were studied using argon, silane, and acetylene. The experimental results demonstrate that a stable discharge can be established inside the tube. It was found that when the precursor gas is employed, a temperature gradient on the tube surface is formed. Secondly, PECVD experiments regarding DLC film deposition inside the inner surface of the tube are described. For this purpose, polished stainless steel and silicon wafer samples were mounted on the inside tube surface for subsequent analysis of the coatings. It was found that the growth rate and the structure properties of the DLC film varied along the axial direction of the tube. However, surfaces of DLC film with high sp(3) content provided better tribological characteristics. These results were mainly attributed to complex processes of local dissociation and activation happened by collision between the electrons and neutrals. (AU)

• Processo FAPESP: 15/09781-0 - Estudo do crescimento de filme DLC no interior de tubos longos usando a técnica DC pulsado PECVD
• Beneficiário: Elver Juan de Dios Mitma Pillaca
• Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado
• Processo FAPESP: 12/15857-1 - Estudos científicos e aplicações inovadoras em diamante-CVD, Diamond-Like Carbon (DLC) e carbono nanoestruturado, obtidos por deposição química na fase vapor
• Beneficiário: Vladimir Jesus Trava-Airoldi
• Modalidade de apoio: Auxílio à Pesquisa - Temático