Enhancement of the ozone-sensing properties of ZnO through chemical-etched surface texturing

Autor(es)

dos Santos Silva, Weverton A. ; de Lima, Bruno S. ; Bernardi, Maria I. B. ; Mastelaro, Valmor R.

• Tipo de documento: Artigo Científico
• Fonte: JOURNAL OF NANOPARTICLE RESEARCH; v. 24, n. 5, p. 11-pg., 2022-05-01.

Resumo

Semiconductor metal oxides (SMOx) are widely studied for different applications. It is well established that the gas-SMOx interaction strongly depends on the charge exchange between the exposed surface area and the target gas. Hence, nanostructuring processes can amplify these surface effects and enhance SMOx sensitivity. Recently, different studies have demonstrated that nanostructured ZnO-based devices exhibit improved efficiency by chemical etched surface texturing using diluted hydrochloric acid (HCl) solutions. In this context, this study investigates the influence of chemical etching by HCl on the gas-sensing properties of ZnO thin films regarding ozone (O-3) detection. The X-ray photoelectron spectroscopy analysis suggested an increase in the density of surface defects in the etched samples, leading to a higher density of adsorption sites for gas molecules. Scanning electron microscopy images before and after acid immersion revealed an increase in the surface area as the average grain size decreases and the film's porosity increases. Measurements of the gas-sensing properties operating at 300 degrees C showed that the nanostructuring process significantly enhances the sensitivity of ZnO thin films for O-3 detection, indicating a synergic effect between the grain size decrease and the porosity increase. Our results demonstrate that this methodology can be used to enhance the sensitivity of SMOx-based gas sensors. (AU)

• Processo FAPESP: 19/22076-5 - Nanocompósitos a base de grafeno reduzido (rGO) e óxidos semicondutores metálicos (MOS) para aplicação como sensores de gases tóxicos
• Beneficiário: Valmor Roberto Mastelaro
• Modalidade de apoio: Auxílio à Pesquisa - Regular
• Processo FAPESP: 18/07517-2 - Compósitos de grafeno e óxidos metálicos: aplicação como sensores de gases tóxicos
• Beneficiário: Bruno Sanches de Lima
• Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado
• Processo FAPESP: 13/07296-2 - CDMF - Centro de Desenvolvimento de Materiais Funcionais
• Beneficiário: Elson Longo da Silva
• Modalidade de apoio: Auxílio à Pesquisa - Centros de Pesquisa, Inovação e Difusão - CEPIDs
• Processo FAPESP: 19/22899-1 - Nanocompósitos a base de grafeno para aplicações como sensores de gás
• Beneficiário: Bruno Sanches de Lima
• Modalidade de apoio: Bolsas no Exterior - Estágio de Pesquisa - Pós-Doutorado