Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor

Autor(es)

Rasia, Luiz Antonio ; Leal, Gabriela ; Koberstein, Leandro Leo ; Furlan, Humber ; Massi, Marcos ; Fraga, Mariana Amorim ; FigueroaGarcia, JC ; LopezSantana, ER ; FerroEscobar, R

• Tipo de documento: Artigo Científico
• Fonte: APPLIED COMPUTER SCIENCES IN ENGINEERING; v. 742, p. 11-pg., 2017-01-01.

Resumo

Diamond-like carbon (DLC) thin films have been investigated for a wide range of applications due to their excellent electrical and mechanical properties. In the last decade, several researches and development activities have been conducted on the use of these thin films as piezoresistors in MEMS pressure sensors. This paper provides an overview on the design of a piezoresistive pressure sensor constituted of a silicon circular diaphragm with four DLC thin-film piezoresistors arranged in the Wheatstone bridge configuration. The sensor was designed from analytical formulas found in the literature. (AU)

• Processo FAPESP: 13/17045-7 - Fabricação e caracterização de sensores piezorresistivos baseados em filmes finos de DLC
• Beneficiário: Gabriela Leal
• Modalidade de apoio: Bolsas no Brasil - Doutorado
• Processo FAPESP: 14/18139-8 - Estudos de crescimento e de dopagens de diamante-CVD mono cristalino, colorido via descarga em mW 2,45 GHz de alta potência
• Beneficiário: Mariana Amorim Fraga
• Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado