Estimation of the thickness and the optical parameters of several stacked thin films using optimization

Autor(es)

Andrade, Ricardo ; Birgin, Ernesto G. ; Chambouleyron, Ivan ; Martinez, Jose Mario ; Ventura, Sergio D.

• Tipo de documento: Artigo Científico
• Fonte: APPLIED OPTICS; v. 47, n. 28, p. 13-pg., 2008-10-01.

Resumo

The reverse engineering problem addressed in the present research consists of estimating the thicknesses and the optical constants of two thin films deposited on a transparent substrate using only transmittance data through the whole stack. No functional dispersion relation assumptions are made on the complex refractive index. Instead, minimal physical constraints are employed, as in previous works of some of the authors where only one film was considered in the retrieval algorithm. To our knowledge this is the first report on the retrieval of the optical constants and the thickness of multiple film structures using only transmittance data that does not make use of dispersion relations. The same methodology may be used if the available data correspond to normal reflectance. The software used in this work is freely available through the PUMA Project web page (http://www.ime.usp.br/similar to egbirgin/puma/). (C) 2008 Optical Society of America (AU)

• Processo FAPESP: 06/51827-9 - Otimização global em problemas de programação não linear
• Beneficiário: Ernesto Julián Goldberg Birgin
• Modalidade de apoio: Bolsas no Exterior - Pesquisa
• Processo FAPESP: 06/53768-0 - Métodos computacionais de otimização
• Beneficiário: José Mário Martinez Perez
• Modalidade de apoio: Auxílio à Pesquisa - Temático