Fabrication and Characterization of an Impedance Micro-Bridge for Lab-on-a-Chip

Autor(es)

Bento Ribeiro, L. E. ; Piazzetta, M. H. O. ; Gobbi, A. L. ; Costa, J. S. ; Fracassi da Silva, J. A. ; Fruett, F. ; Pavanello, MA ; Claeys, C ; Martino, JA

• Tipo de documento: Artigo Científico
• Fonte: MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2010; v. 31, n. 1, p. 9-pg., 2010-01-01.

Resumo

This paper describes a fabrication technique of planar impedance micro-bridge microstructures with electrodes gap of 10 mu m, 15 mu m and 20 mu m on glass substrate. The microscope inspection showed that the structures well reproduced the design of the masks. The impedances were measured and the results shown a good repeatability with a standard deviation of 11.4%. Furthermore, microchannels fabricated in PDMS were aligned with the micro-bridges. Using O-2 plasma we obtained irreversible adhesion between PDMS and glass as between the PDMS and the electrodes. This fabrication technique, which merges microelectronic sensors with fluidic devices, is very suitable for Lab-on-a-Chip applications. (AU)

• Processo FAPESP: 08/57862-6 - NAMITEC
• Beneficiário: Jacobus Willibrordus Swart
• Modalidade de apoio: Auxílio à Pesquisa - Temático