Diamond turning of small Fresnel lens array in single crystal InSb

Autor(es)

Jasinevicius, R. G. ^[1] ; Duduch, J. G. ^[1] ; Cirino, G. A. ^[2] ; Pizani, P. S. ^[3]

Afiliação do(s) autor(es)

^[1] Univ Sao Paulo, EESC, Dept Engn Mecan, BR-13566590 Sao Carlos, SP - Brazil

^[2] Univ Fed Sao Carlos, Dept Elect Engn, BR-13565905 Sao Carlos, SP - Brazil

^[3] Univ Fed Sao Carlos, Dept Fis, BR-13565905 Sao Carlos, SP - Brazil

• Tipo de documento: Artigo Científico
• Fonte: JOURNAL OF MICROMECHANICS AND MICROENGINEERING; v. 23, n. 5 MAY 2013.
• Citações Web of Science: 4

Resumo

A small Fresnel lens array was diamond turned in a single crystal (0 0 1) InSb wafer using a half-radius negative rake angle (-25 degrees) single-point diamond tool. The machined array consisted of three concave Fresnel lenses cut under different machining sequences. The Fresnel lens profiles were designed to operate in the paraxial domain having a quadratic phase distribution. The sample was examined by scanning electron microscopy and an optical profilometer. Optical profilometry was also used to measure the surface roughness of the machined surface. Ductile ribbon-like chips were observed on the cutting tool rake face. No signs of cutting edge wear was observed on the diamond tool. The machined surface presented an amorphous phase probed by micro Raman spectroscopy. A successful heat treatment of annealing was carried out to recover the crystalline phase on the machined surface. The results indicated that it is possible to perform a `mechanical lithography' process in single crystal semiconductors. (AU)

• Processo FAPESP: 08/53641-5 - Avaliação de microestruturas ópticas geradas através de torneamento com ferramenta de diamante
• Beneficiário: Renato Goulart Jasinevicius
• Modalidade de apoio: Auxílio à Pesquisa - Regular