Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures

Autor(es)

Rosa, A. M. ^[1] ; da Silva, E. P. ^[1] ; Chaves, M. ^[1] ; Trino, L. D. ^[2] ; Lisboa-Filho, P. N. ^[2] ; da Silva, T. F. ^[3] ; Durrant, S. F. ^[1] ; Bortoleto, J. R. R. ^[1]

Afiliação do(s) autor(es)

^[1] Sao Paulo State Univ UNESP, Lab Technol Plasmas, Sorocaba, SP - Brazil

^[2] Sao Paulo State Univ UNESP, Grp Adv Mat, Bauru, SP - Brazil

^[3] Univ Sao Paulo, Lab Mat Anal Ion Beams, Sao Paulo - Brazil

• Tipo de documento: Artigo de Revisão
• Fonte: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS; v. 24, n. 9, p. 3143-3148, SEP 2013.
• Citações Web of Science: 6

Resumo

Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the films were studied as a function of the substrate temperature, which was varied from 50 to 250 A degrees C. The surface topography of the samples was examined using atomic force microscopy (AFM), and their optical properties were studied via transmittance measurements in the UV-Vis-NIR region. DRX and AFM analyses showed that the surface morphology undergoes a structural transition at substrate temperatures of around 150 A degrees C. Actually, at 50 A degrees C the formation of small grains was observed while at 250 A degrees C the grains observed were larger and had more irregular shapes. The optical gap remained constant at similar to 3.3 eV for all films. In the visible region, the average optical transmittance was 80 %. From these results, one can conclude that the morphological properties of the ZnO thin films were more greatly affected by the substrate temperature, due to mis-orientation of polycrystalline grains, than were the optical properties. (AU)

• Processo FAPESP: 08/53311-5 - Síntese e integração de nanoestruturas, filmes finos e superfícies modificadas
• Beneficiário: José Roberto Ribeiro Bortoleto
• Modalidade de apoio: Auxílio à Pesquisa - Jovens Pesquisadores