Well-established materials in microelectronic devices systems for differential-mode extended-gate field effect transistor chemical sensors

Autor(es)

Pedroza Dias Mello, Hugo Jose Nogueira ^[1] ; Mulato, Marcelo ^[1]

Afiliação do(s) autor(es)

^[1] Univ Sao Paulo, Dept Phys, Fac Philosophy Sci & Letters Ribeirao Preto, Ave Bandeirantes 3900, BR-14040901 Ribeirao Preto, SP - Brazil

• Tipo de documento: Artigo Científico
• Fonte: MICROELECTRONIC ENGINEERING; v. 160, p. 73-80, JUL 1 2016.
• Citações Web of Science: 5

Resumo

Well-established materials commonly used in microfabrication industry were studied as chemical sensing elements of extended gate field effect transistor (EGFET) chemical sensors. Microelectronic components were used in the differential mode of operation. Three differential pairs of films made of polyaniline (protonated and non-protonated), fluorine doped tin oxide and titanium dioxide were used: PANI-EB x PANI-ES, PANI-EB x FTO and FTO x TiO2. Good linearity was observed for all cases in the pH range 3 to 8. The differential measurements were also performed as a function of: i) temperature in the range 30 degrees C to 50 degrees C, ii) buffer concentration from 1 mM to 400 mM, and iii) time, for three hours. Hysteresis measurements for the 5-2-5-8-5 pH loop cycle were also conducted. The pair composed of polyaniline in the protonated and non-protonated form presented the best results with a sensitivity, of 37 +/- 4 mV/pH, good linearity, and stable response against variation of temperature and buffer concentration. A similarity in ion-sensing mechanisms and electrical properties of the single films is necessary for the fabrication of good and stable differential sensors as will be discussed. These materials can be satisfactorily used in miniaturized electronic sensor systems, thus promising great advances in the field. (C) 2016 Elsevier B.V. All rights reserved. (AU)

• Processo FAPESP: 14/09562-4 - Biossensores microeletrônicos associados a técnicas eletroquímicas
• Beneficiário: Marcelo Mulato
• Modalidade de apoio: Auxílio à Pesquisa - Regular
• Processo FAPESP: 14/24559-0 - Matriz multimodal de biossensores enzimáticos: Potenciométrico diferencial, óptico e condutométrico.
• Beneficiário: Hugo José Nogueira Pedroza Dias Mello
• Modalidade de apoio: Bolsas no Brasil - Doutorado