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(Referência obtida automaticamente do Web of Science, por meio da informação sobre o financiamento pela FAPESP e o número do processo correspondente, incluída na publicação pelos autores.)

Deposition of thin films using argon/acetylene atmospheric pressure plasma jet

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Autor(es):
Ricci Castro, Alonso H. ; Kodaira, Felipe V. P. ; Prysiazhnyi, Vadym ; Mota, Rogerio P. ; Kostov, Konstantin G.
Número total de Autores: 5
Tipo de documento: Artigo Científico
Fonte: SURFACE & COATINGS TECHNOLOGY; v. 312, p. 13-18, FEB 25 2017.
Citações Web of Science: 7
Resumo

Atmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a. stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 mu m was obtained after the first two minutes, while in the next two minutes only 1.3 mu m film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of C-H and few C-O bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/min, showing the potential of such plasma jet system for large-scale depositions. (C) 2016 Elsevier B.V. All rights reserved. (AU)

Processo FAPESP: 13/06732-3 - Aplicação de jato de plasma frio em pressão atmosférica no tratamento de materiais e esterilização
Beneficiário:Vadym Prysiazhnyi
Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado