Laser Patterning a Chem-FET Like Device on a V2O5 Xerogel Film

Autor(es)

Huila, Manuel F. G. ^[1] ; Parussulo, Andre L. A. ^[1] ; Armas, Luis E. G. ^[2] ; Peres, Henrique E. M. ^[3] ; Seabra, Antonio C. ^[3] ; Ramirez-Fernandez, Francisco J. ^[3] ; Araki, Koiti ^[1] ; Toma, Henrique E. ^[1]

Afiliação do(s) autor(es)

^[1] Univ Sao Paulo, Inst Quim, BR-05508000 Sao Paulo - Brazil

^[2] Univ Fed Pampa, BR-96413170 Bage - Brazil

^[3] Univ Sao Paulo, Escola Politecn, BR-05508970 Sao Paulo - Brazil

• Tipo de documento: Artigo Científico
• Fonte: IEEE SENSORS JOURNAL; v. 18, n. 4, p. 1358-1363, FEB 15 2018.
• Citações Web of Science: 1

Resumo

Vanadium pentoxide xerogel films deposited onto gold microelectrodes were micropatterned by thermally induced conversion into crystalline alpha-V2O5, using optical lithography written at the focus of a confocal Raman microscope. The laser scribing process improved the electric contact and promoted the n-doping of the film with VIV ions. In this way, a field effect transistor like device was constructed and successfully applied as humidity sensor, where the combined lithographic design and the application of a negative back gate field (V-G = -10.0 V) boosted the source-drain current by a hundred times, leading to a large gain in sensitivity. (AU)

• Processo FAPESP: 13/24725-4 - Química supramolecular e nanotecnologia
• Beneficiário: Henrique Eisi Toma
• Modalidade de apoio: Auxílio à Pesquisa - Temático