Influence of the structure and composition of titanium nitride substrates on carbon nanotubes grown by chemical vapour deposition

Autor(es)

Morales, M. ^[1] ; Cucatti, S. ^[1] ; Acuna, J. J. S. ^[2] ; Zagonel, L. F. ^[3] ; Antonin, O. ^[4] ; Hugon, M. C. ^[4] ; Marsot, N. ^[4] ; Bouchet-Fabre, B. ^[5] ; Minea, T. ^[4] ; Alvarez, F. ^[1]

Afiliação do(s) autor(es)

^[1] Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP - Brazil

^[2] Univ Fed Santa Catarina, Lab Cent Microscopia Eletron, BR-88040970 Florianopolis, SC - Brazil

^[3] Brazilian Nanotechnol Natl Lab, Electron Microscopy Lab, Campinas, SP - Brazil

^[4] Univ Paris 11, CNRS, UMR 8578, Lab Phys Gaz & Plasmas, F-91405 Orsay - France

^[5] CEA Saclay, URA 2453, CNRS, CEA, Lab Francis Perrin, Serv Photons Atomes & Mol, F-91191 Gif Sur Yvette - France

• Tipo de documento: Artigo Científico
• Fonte: JOURNAL OF PHYSICS D-APPLIED PHYSICS; v. 46, n. 15 APR 17 2013.
• Citações Web of Science: 3

Resumo

The influence of nano-structure and composition of the substrate on the properties of carbon nanotubes (CNTs) is presented. The samples are obtained following a sequential in situ deposition routine. First, TiNxOy films are grown on a crystalline silicon substrate. Immediately, dispersed nickel catalyst particles are deposited on the film. The non-stoichiometric TiNxOy films and Ni particles are grown by ion beam sputtering of Ti and Ni targets, respectively. Soon after that, the CNTs are grown by feeding acetylene gas into the chamber and maintaining the substrate at 973 K. In situ x-ray photoelectron spectroscopy allows compositional and structural analysis in all the stages of the sample growth process. The CNTs are further studied by scanning and transmission electron microscopy techniques, showing different population densities, sizes and diameters as a function of the oxygen content in the TiNxOy films. The results show that oxygen influences the surface diffusion mobility of the precursor carbon atoms involved in the growth of nanotubes suggesting the inhibition of catalyst particle coarsening. It is concluded that, in addition to acting as a diffusion barrier between the catalyst particles and the silicon support, the TiNxOy films modify the growth kinetics of the CNTs. (AU)

• Processo FAPESP: 05/53926-1 - Pesquisa e desenvolvimento de novos materiais de interesse em nanotecnologia: aplicações na indústria (micro-) eletrônica e metal-mecânica
• Beneficiário: Fernando Alvarez
• Linha de fomento: Auxílio à Pesquisa - Temático