Investigation on diamond turning of silicon crystal - generation mechanism of surface cut with worn tool

Autor(es)

Renato G. Jasinevicius ^[1] ; Jaime G. Duduch ^[2] ; Arthur J. V. Porto ^[3]

Afiliação do(s) autor(es)

^[1] Universidade de São Paulo. EESC. Department of Mechanical Engineering - Brasil

^[2] Universidade de São Paulo. EESC. Department of Mechanical Engineering - Brasil

^[3] Universidade de São Paulo. EESC. Department of Mechanical Engineering - Brasil

• Tipo de documento: Artigo Científico
• Fonte: Journal of the Brazilian Society of Mechanical Sciences; v. 23, n. 2, p. 241-252, 2001-00-00.
• Assunto(s): Topografia Diamante Microscopia eletrônica de varredura Microscopia de força atômica

Resumo

This paper discusses the effect of tool wear on surface finish in single-point diamond turning of single crystal silicon. The morphology and topography of the machined surface clearly show the type of cutting edge wear reproduced onto the cutting grooves. Scanning electron microscopy is used in order to correlate the cutting edge damage and microtopography features observed through atomic force microscopy. The possible wear mechanisms affecting tool performance and surface generation during cutting are also discussed. The zero degree rake angle single point diamond tool presented small nicks on the cutting edge. The negative rake angle tools presented more a type of crater wear on the rake face. No wear was detected on flank face of the diamond tools. (AU)

• Processo FAPESP: 98/11300-3 - Estudo do efeito da transformacao de fase induzida por pressao/tensao no torneamento de ultraprecisao em regime ductil em monocristais semicondutores de silicio.
• Beneficiário: RENATO GOULART JASINEVICIUS
• Modalidade de apoio: Bolsas no Brasil - Pós-Doutorado