Topology Optimization and Microfabrication Constraints

Autor(es)

Najafabadi, Hossein R. ; Verona, Bruno M. ; Goto, Tiago G. ; Martins, Thiago C. ; Barari, Ahmad ; Tsuzuki, Marcos S. G. ; Tsuzuki, MDG ; Pessoa, MAD

• Tipo de documento: Artigo Científico
• Fonte: 2021 14TH IEEE INTERNATIONAL CONFERENCE ON INDUSTRY APPLICATIONS (INDUSCON); v. N/A, p. 4-pg., 2021-01-01.

Resumo

In this paper, a non-gradient topology optimization method developed with simulated annealing combined with density filter and morphology operators. The presented method can address the manufacturing limitations of microfabrication process. The minimum feature size and sharp edges which are the main limits in the lithography and etching processes are considered in this algorithm. The results of topology optimization of a cantilever beam used to verify this method and show the changes in topology. The final results after applying morphology operators and density filters do not make a big change in the performance of the system while applying the microfabrication constraints. (AU)

• Processo FAPESP: 19/03453-2 - Sensor inercial micro-eletro-mecânico para cidades inteligentes
• Beneficiário: Hossein Rostami Najafabadi
• Modalidade de apoio: Bolsas no Brasil - Doutorado