Topology Optimization and Microfabrication Constraints

Author(s)

Najafabadi, Hossein R. ; Verona, Bruno M. ; Goto, Tiago G. ; Martins, Thiago C. ; Barari, Ahmad ; Tsuzuki, Marcos S. G. ; Tsuzuki, MDG ; Pessoa, MAD

• Document type: Journal article
• Source: 2021 14TH IEEE INTERNATIONAL CONFERENCE ON INDUSTRY APPLICATIONS (INDUSCON); v. N/A, p. 4-pg., 2021-01-01.

Abstract

In this paper, a non-gradient topology optimization method developed with simulated annealing combined with density filter and morphology operators. The presented method can address the manufacturing limitations of microfabrication process. The minimum feature size and sharp edges which are the main limits in the lithography and etching processes are considered in this algorithm. The results of topology optimization of a cantilever beam used to verify this method and show the changes in topology. The final results after applying morphology operators and density filters do not make a big change in the performance of the system while applying the microfabrication constraints. (AU)

• FAPESP's process: 19/03453-2 - MEMS-based inertial sensor for smart cities
• Grantee: Hossein Rostami Najafabadi
• Support Opportunities: Scholarships in Brazil - Doctorate