Influence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films

Autor(es)

Martins, Denis E. ^[1] ; Gozzi, Giovani ^[1] ; Santos, Lucas Fugikawa ^{[2, 1]}

Afiliação do(s) autor(es)

^[1] Univ Estadual Paulista UNESP, Dept Fis, Ave 24A, 1515, BR-13500970 Rio Claro, SP - Brazil

^[2] Univ Estadual Paulista UNESP, Dept Fis, Rua Cristovao Colombo 2265, BR-15054000 Sao Jose Do Rio Preto, SP - Brazil

• Tipo de documento: Artigo Científico
• Fonte: MRS ADVANCES; v. 3, n. 5, p. 283-289, 2018.
• Citações Web of Science: 1

Resumo

In the current work, we evaluate the influence of the processing parameters on the electrical properties of aluminium zinc oxide (AZO) thin films produced by airbrush spray-pyrolysis deposition technique. Spray-deposited AZO thin-films were produced with Al:Zn molar ratios varying from 0 % (pure ZnO) up to 30 %, using aluminium acetate and zinc acetate as organic precursors and water as solvent. Thermogravimetric analysis (TGA) and infrared spectroscopy (FTIR-ATR) were used to monitor the metal-oxide formation from the organic precursors as a function of the temperature. The results show that a temperature of 400 degrees C is necessary to completely degrade the organic phase and to obtain the desired inorganic metal-oxides films. The electrical properties of the TMOs were evaluated by d.c. current-voltage (IV) analysis using planar thermally evaporated Al electrodes on top of the TMO layer, with different aspect ratios (1/18, 2/9, 5/13, 5/9 and 8/9). The lowest sheet resistance was obtained for AZO films at a molar Al concentration of 5 %. We also observed that, after carrying out a post-annealing treatment (30 mbar, 150 degrees C) the samples presented a decrease on the sheet resistance superior to 60 %, in comparison to the samples before the treatment. (AU)

• Processo FAPESP: 08/57706-4 - Instituto Nacional de Eletrônica Orgânica (INEO)
• Beneficiário: Roberto Mendonça Faria
• Modalidade de apoio: Auxílio à Pesquisa - Temático
• Processo FAPESP: 17/22018-0 - 2017 MRS Fall Meeting and Exhibit
• Beneficiário: Lucas Fugikawa Santos
• Modalidade de apoio: Auxílio à Pesquisa - Reunião - Exterior
• Processo FAPESP: 13/24461-7 - Estudo da influência do controle de atmosfera no desempenho de transistores de filme fino para aplicações em circuitos transparentes e/ou flexíveis
• Beneficiário: Lucas Fugikawa Santos
• Modalidade de apoio: Auxílio à Pesquisa - Regular