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(Reference retrieved automatically from Web of Science through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Influence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films

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Author(s):
Martins, Denis E. [1] ; Gozzi, Giovani [1] ; Santos, Lucas Fugikawa [2, 1]
Total Authors: 3
Affiliation:
[1] Univ Estadual Paulista UNESP, Dept Fis, Ave 24A, 1515, BR-13500970 Rio Claro, SP - Brazil
[2] Univ Estadual Paulista UNESP, Dept Fis, Rua Cristovao Colombo 2265, BR-15054000 Sao Jose Do Rio Preto, SP - Brazil
Total Affiliations: 2
Document type: Journal article
Source: MRS ADVANCES; v. 3, n. 5, p. 283-289, 2018.
Web of Science Citations: 1
Abstract

In the current work, we evaluate the influence of the processing parameters on the electrical properties of aluminium zinc oxide (AZO) thin films produced by airbrush spray-pyrolysis deposition technique. Spray-deposited AZO thin-films were produced with Al:Zn molar ratios varying from 0 % (pure ZnO) up to 30 %, using aluminium acetate and zinc acetate as organic precursors and water as solvent. Thermogravimetric analysis (TGA) and infrared spectroscopy (FTIR-ATR) were used to monitor the metal-oxide formation from the organic precursors as a function of the temperature. The results show that a temperature of 400 degrees C is necessary to completely degrade the organic phase and to obtain the desired inorganic metal-oxides films. The electrical properties of the TMOs were evaluated by d.c. current-voltage (IV) analysis using planar thermally evaporated Al electrodes on top of the TMO layer, with different aspect ratios (1/18, 2/9, 5/13, 5/9 and 8/9). The lowest sheet resistance was obtained for AZO films at a molar Al concentration of 5 %. We also observed that, after carrying out a post-annealing treatment (30 mbar, 150 degrees C) the samples presented a decrease on the sheet resistance superior to 60 %, in comparison to the samples before the treatment. (AU)

FAPESP's process: 13/24461-7 - Influence of the atmosphere control on the performance of thin-film transistors for applications in Flexible/Transparent circuitry
Grantee:Lucas Fugikawa Santos
Support type: Regular Research Grants
FAPESP's process: 08/57706-4 - National Institute of Science and Technology on Organic Electronics (INEO)
Grantee:Roberto Mendonça Faria
Support type: Research Projects - Thematic Grants
FAPESP's process: 17/22018-0 - 2017 MRS Fall Meeting and exhibit
Grantee:Lucas Fugikawa Santos
Support type: Research Grants - Meeting - Abroad