Smart electromechanical packaging of piezoresistive pressure microsensors used in industrial transducers and pressure transmitters

• Grant number: 20/00791-1
• Support Opportunities: Research Grants - Innovative Research in Small Business - PIPE
• Start date: December 01, 2020
• End date: October 31, 2021
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal Investigator: Paulo Roberto Costa Junior
• Grantee: Paulo Roberto Costa Junior
• Company: Provider Controls - Instrumentação e Automação Ltda
• CNAE: Fabricação de componentes eletrônicos ; Fabricação de aparelhos e equipamentos de medida, teste e controle
• City: São Paulo
• Associated researchers: Humber Furlan

Abstract

Stainless steel encapsulated pressure sensors are widely used for manufacturing industrially applied pressure transducers and transmitters, fluid (including oil) control and transport systems, and avionics control. This project consists of manufacturing a type of package: * encapsulation made of AISI 316 stainless steel (used in aggressive and non-aggressive media) modifying its physical structure other than what has already been proven feasible with FAPESP's PIPE phase I project (02/12883-0). This type of encapsulation prepares PROVIDER to conquer the market with different costs which can serve different applications depending on the customer's request. Stainless steel encapsulated pressure microsensors have the following elements: * Piezoresistive pressure microscope made of silicon (microelectronics). * Electrical terminals for electrical contacts with measuring devices. * 316 stainless steel enclosure. * 316 stainless steel membrane. * Depending on the process may have membrane back ring.* Glass or preform-glass resin for insulation of electrical terminals. * Ceramic part for electrical and thermal protection of the sensor chip. Silicon microsensors are consumables that should be imported along with their resin-fixture in their die-attach positions. The diaphragms will be made by stamping plates of two different thicknesses in different materials comprising the construction of each type of sensor. These sheets should be imported as there are no manufacturers in the country who can guarantee adequate thicknesses for the manufacture of the diaphragms for sealing the pressure sensor isolated from the medium. (AU)