End-point detection of polymer etching using Langmuir probes

Grant number:	00/09679-6
Support Opportunities:	Regular Research Grants - Publications - Scientific article
Start date:	October 01, 2000
End date:	September 30, 2001
Field of knowledge:	Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation

Principal Investigator:	Patrick Bernard Verdonck
Grantee:	Patrick Bernard Verdonck

Host Institution:	Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Articles published in Agência FAPESP Newsletter about the research grant:

TITULO

Articles published in other media outlets ( ):

More items Less items

VEICULO: TITULO (DATA)