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Characterization of novel classes of piezoelectric flextensional actuators and multi-actuated piezoelectric actuators by using optical interferometry

Abstract

In science modern areas, the nanopositioning of tools by using actuators is a major requirement. Solid state based piezoelectric actuators constitute attractive solutions to achieve this task. Piezoelectric flextensional actuators are devices composed by piezoceramics and aluminum flexible structures which amplify and convert extensional to flexural displacement form. However, because their complex structures these kinds of devices usually can not be modeled, designed or simulated by using analytical methods. The optical technique, such as the interferometric one, provides several advantages relative to the others conventional methods for validating, testing and characterization of this kind of transducers. Due to its extreme sensitivity and no physical contact with the sample, the technique is very suitable for measuring displacements in nanoscale. In this project, the author proposes the application of optical interferometry to characterize two novel classes of devices: piezoelectrical flextensional actuators and multi-actuated piezoelectric transducers (which use several piezoceramics). Measurements such as displacement linearity, hysteresis, dynamic range, frequency response, mechanical resonant frequencies, tracking errors and force can be realized. Novel techniques addressed to the interferometric signal demodulation will be investigated, aiming the development of automatic, homodyne, passive, direct, self-consistent, with no phase ambiguity problem, fading immune and wide dynamic range detection methods. The training and development of human resources in optoelectronic area also constitute an important goal of this project. (AU)

Articles published in Agência FAPESP Newsletter about the research grant:
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VEICULO: TITULO (DATA)
VEICULO: TITULO (DATA)

Scientific publications
(References retrieved automatically from Web of Science and SciELO through information on FAPESP grants and their corresponding numbers as mentioned in the publications by the authors)
MARCAL, LUIZ A. P.; GALETI, JOSE HENRIQUE; HIGUTI, RICARDO T.; KITANO, CLAUDIO; SILVA, EMILIO C. N.; IEEE. Interferometric Measurements of Nanometric Displacements in a Piezoelectric Flextensional Actuator by Using the New J(1) ... J(5) Method. 2012 10TH IEEE/IAS INTERNATIONAL CONFERENCE ON INDUSTRY APPLICATIONS (INDUSCON), v. N/A, p. 6-pg., . (12/01629-7)
GALETI, JOSE HENRIQUE; BERTON, PAULA LALUCCI; KITANO, CLAUDIO; HIGUTI, RICARDO TOKIO; CARBONARI, RONNY CALIXTO; NELLI SILVA, EMILIO CARLOS. Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements. APPLIED OPTICS, v. 52, n. 28, p. 6919-6930, . (12/01629-7)
MARCAL, L. A. P.; KITANO, C.; HIGUTI, R. T.; NADER, G.; SILVA, E. C. N.. A high dynamic range method for the direct readout of a dynamic phase change in homodyne interferometers. MEASUREMENT SCIENCE & TECHNOLOGY, v. 23, n. 12, . (12/01629-7)