Study of power balance in electronegative capacitively coupled plasmas

Grant number:	03/08461-5
Support Opportunities:	Research Grants - Meeting - Brazil
Start date:	September 08, 2003
End date:	September 11, 2003
Field of knowledge:	Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation

Principal Investigator:	Patrick Bernard Verdonck
Grantee:	Patrick Bernard Verdonck

Host Institution:	Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

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