| Full text | |
| Author(s): |
Bento Ribeiro, L. E.
;
Piazzetta, M. H. O.
;
Gobbi, A. L.
;
Costa, J. S.
;
Fracassi da Silva, J. A.
;
Fruett, F.
;
Pavanello, MA
;
Claeys, C
;
Martino, JA
Total Authors: 9
|
| Document type: | Journal article |
| Source: | MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2010; v. 31, n. 1, p. 9-pg., 2010-01-01. |
| Abstract | |
This paper describes a fabrication technique of planar impedance micro-bridge microstructures with electrodes gap of 10 mu m, 15 mu m and 20 mu m on glass substrate. The microscope inspection showed that the structures well reproduced the design of the masks. The impedances were measured and the results shown a good repeatability with a standard deviation of 11.4%. Furthermore, microchannels fabricated in PDMS were aligned with the micro-bridges. Using O-2 plasma we obtained irreversible adhesion between PDMS and glass as between the PDMS and the electrodes. This fabrication technique, which merges microelectronic sensors with fluidic devices, is very suitable for Lab-on-a-Chip applications. (AU) | |
| FAPESP's process: | 08/57862-6 - NAMITEC |
| Grantee: | Jacobus Willibrordus Swart |
| Support Opportunities: | Research Projects - Thematic Grants |