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Experimental Comparison of HfO2/X-Based ReRAM Devices Switching Properties by the MIM Capacitance

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Author(s):
da Costa, Fernando Jose ; Zeinati, Aseel ; Trevisoli, Renan ; Misra, Durga ; Doria, Rodrigo Trevisoli
Total Authors: 5
Document type: Journal article
Source: IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY; v. 12, p. 7-pg., 2024-01-01.
Abstract

The objective of this work is to present a comparison of the switching properties in Resistive Random-Access-Memory between two different switching layer devices through the capacitance measurements. The analysis was carried out in two devices with different insulating layers, one composed of H-plasma-treated HfO(2 )and another with a stoichiometric HfO2. The device with a higher quantity of oxygen vacancy-related defects in the insulator (HfO2 w/trt) presents a wider spread of the capacitance with the application of a range of varying pulse widths. An increase in the capacitance from 3.904 to 3.917 pF/mu m(2) was observed for the same device when it was subjected to a 144 mu s pulse width, demonstrating a conductance quantization required for the application in in-memory computing systems. Also, the dielectric constant modulates due to the migration of oxygen atoms inside the device's insulator. (AU)

FAPESP's process: 23/14970-3 - Electrical Characterization, Simulation, and Fabrication of Resistive Random Access Memories - ReRAMs
Grantee:Fernando José da Costa
Support Opportunities: Scholarships in Brazil - Post-Doctoral