Study of RF with DC plasma discharges

• Grant number: 06/05233-0
• Support Opportunities: Regular Research Grants
• Start date: February 01, 2007
• End date: October 31, 2008
• Field of knowledge: Physical Sciences and Mathematics - Physics - Physics of Fluids, Plasma Physics and Electrical Discharge
• Principal Investigator: Munemasa Machida
• Grantee: Munemasa Machida
• Host Institution: Instituto de Física Gleb Wataghin (IFGW). Universidade Estadual de Campinas (UNICAMP). Campinas , SP, Brazil

Abstract

A DC/RF plasma device has been built to study: the VxI plasma production curve, hysteresis phenomenon at the dark to glow discharge transition, density and temperature differences and energy distribution at the glow discharge region will be studied, using RF and DC discharge, simultaneously or not. The main diagnostic tools will be the Langmuir probes and a visible multichannel spectrometer to observe the different gas plasma species. (AU)