Electromechanical packaging of environmentally isolated piezoresistant pressure sensors used in industrial pressure transducer and transmitters

• Grant number: 02/12883-0
• Support Opportunities: Research Grants - Innovative Research in Small Business - PIPE
• Start date: September 01, 2003
• End date: July 31, 2008
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal Investigator: Humber Furlan
• Grantee: Humber Furlan
• Company: Orion Indústria e Comércio de Sistemas Automatos de Pressão Ltda
• City: São Paulo

Abstract

The project’s objective is to make viable the building of a prototype environmentally isolated pressure sensor, using a low cost high quality stainless steel structure for use in the measurement of pressures in gases, liquids and in media compatible with steel AISI 316. This entails a device with excellent stability and adequate longevity for industrial applications, in automotive diagnostic systems, in hydraulics and other market segments which require high precision and high performance. This type of apparatus incorporates the state of the art technology in environmentally isolated pressure sensors and can be used for pressure transducers and transmitters. The prototype pressure sensor will contain: silica piezoresistant microsensor; electrical terminals for contact; stainless steel casing; stainless steel membrane; ring to secure membrane; vitreous resin for insulation of electrical terminals; and a piece made from ceramic for the electrical and thermal protection of the sensor. The piezoresistant microsensors will be imported and lodged in a mechanical cavity made of stainless steel AISI-316, sealed by means of a corrugated membrane made from the same steel, the chamber of which will be filled with a siliconated liquid, inert to the sensor, which will transmit the pressure between the corrugated membrane and the piezoresistant sensor. Thus, the microsensor will be conditioned by a medium inert to bad weathers and aggressions that possible applications may present. (AU)