Plasma immersion ion implantation using a glow discharge source with controlled plasma potential.

• Grant number: 99/04595-0
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: July 26, 1999
• End date: August 11, 1999
• Field of knowledge: Physical Sciences and Mathematics - Physics - Physics of Fluids, Plasma Physics and Electrical Discharge
• Principal Investigator: Mario Ueda
• Grantee: Mario Ueda
• Host Institution: Instituto Nacional de Pesquisas Espaciais (INPE). Ministério da Ciência, Tecnologia e Inovação (Brasil). São José dos Campos , SP, Brazil