Study of the influence of energy and gas flow on the deposition process of silicon oxide film by pecvd-teos.

• Grant number: 01/00919-7
• Support Opportunities: Research Grants - Meeting - Brazil
• Start date: March 05, 2001
• End date: March 09, 2001
• Field of knowledge: Physical Sciences and Mathematics - Physics - Condensed Matter Physics
• Principal Investigator: Ana Neilde Rodrigues da Silva
• Grantee: Ana Neilde Rodrigues da Silva
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil