Langmuir probe and optical emission spectroscopy study of an inductively coupled plasma source.

• Grant number: 05/02097-5
• Support Opportunities: Research Grants - Meeting - Brazil
• Start date: September 04, 2005
• End date: September 07, 2005
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Andre Mascia Daltrini
• Grantee: Andre Mascia Daltrini
• Host Institution: Pessoa Física