Deep x-ray lithography of su-8.

Grant number:	01/03067-1
Support Opportunities:	Research Grants - Meeting - Abroad
Start date:	June 16, 2001
End date:	June 20, 2001
Field of knowledge:	Engineering - Chemical Engineering - Chemical Technology

Principal Investigator:	Izaque Alves Maia
Grantee:	Izaque Alves Maia

Host Institution:	Associação Brasileira de Tecnologia de Luz Síncrotron (ABTLuS). Ministério da Ciência, Tecnologia e Inovação (Brasil). Campinas , SP, Brazil

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