Study of mos capacitors with rf magnetron sputtering tiox and tioxny as gate dielectric layer

• Grant number: 08/03364-5
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: June 23, 2008
• End date: June 25, 2008
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Katia Franklin Albertin Torres
• Grantee: Katia Franklin Albertin Torres
• Host Institution: Pessoa Física