Emission spectroscopy with high spatial resolution for study of sputtering in reactive plasmas.

• Grant number: 96/09621-0
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: January 21, 1997
• End date: January 24, 1997
• Field of knowledge: Physical Sciences and Mathematics - Physics - Physics of Fluids, Plasma Physics and Electrical Discharge
• Principal Investigator: Stanislav Moshkalev
• Grantee: Stanislav Moshkalev
• Host Institution: Instituto de Física Gleb Wataghin (IFGW). Universidade Estadual de Campinas (UNICAMP). Campinas , SP, Brazil