Phase-shift photomask designed by scalar diffraction theory.

Grant number:	09/52942-4
Support Opportunities:	Research Grants - Meeting - Brazil
Start date:	August 31, 2009
End date:	September 03, 2009
Field of knowledge:	Engineering - Electrical Engineering - Electrical Materials

Principal Investigator:	Giuseppe Antonio Cirino
Grantee:	Giuseppe Antonio Cirino

Host Institution:	Centro Universitário Central Paulista (UNICEP). Associação de Escolas Reunidas (ASSER). São Carlos , SP, Brazil

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