One-step silicon nitride passivation by ECR-CVD for heterostructure transistors and MIS devices

• Grant number: 99/00946-2
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: April 05, 1999
• End date: April 12, 1999
• Field of knowledge: Engineering - Electrical Engineering - Telecommunications
• Principal Investigator: Luiz Eugenio Monteiro de Barros Junior
• Grantee: Luiz Eugenio Monteiro de Barros Junior
• Host Institution: Pessoa Física