Oxygen plasma etching mechanisms of resist.

Grant number:	04/07539-3
Support Opportunities:	Research Grants - Meeting - Brazil
Start date:	September 07, 2004
End date:	September 11, 2004
Field of knowledge:	Engineering - Electrical Engineering - Electrical Materials

Principal Investigator:	Patrick Bernard Verdonck
Grantee:	Patrick Bernard Verdonck

Host Institution:	Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Articles published in Agência FAPESP Newsletter about the research grant:

TITULO

Articles published in other media outlets ( ):

More items Less items

VEICULO: TITULO (DATA)