Optimization of ARROW waveguide's fabrication steps for the application in optical sensors development

• Grant number: 07/08660-9
• Support Opportunities: Scholarships in Brazil - Doctorate
• Start date: July 01, 2008
• End date: September 30, 2011
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal Investigator: Marco Isaías Alayo Chávez
• Grantee: Daniel Orquiza de Carvalho
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Abstract

This project proposes the optimization of all fabrication steps for the developing of ARROW waveguides with low optical losses. The aim is to continue the work developed during the two years that lead to the awarding of the candidate´s master's degree, where some promising results were attained. During that work, three dielectric materials were used: silicon oxynitride (SiOxNy), deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) with different compositions; titanium oxide (TiOx) deposited by RF sputtering technique; and hydrogenated amorphous silicon carbide (a-SiC:H) deposited by PECVD, which has been widely studied by the research group, where the present work will be developed. In particular, the aim of the present work is to attain lower propagation losses, than the ones previously attained, through the study and improvement of the deposition parameters used in the definition of the waveguides sidewalls. Radiation losses in waveguides with different curvatures will also be studied and characterized. Moreover, light insertion techniques will be studied in order to diminish the total insertion losses. Finally, different optical sensors will be studied and fabricated with the process developed during the course of this work, in order to demonstrate the viability of the utilization of the resulting waveguides.

Academic Publications

(References retrieved automatically from State of São Paulo Research Institutions)

CARVALHO, Daniel Orquiza de. Development of integrated optic devices fabrication process in silicon technology for sensing applications.. 2012. Doctoral Thesis - Universidade de São Paulo (USP). Escola Politécnica (EP/BC) São Paulo.